| New RCA Cleaning Solution |
Frontier Cleaner-A01
Frontier Cleaner-A02
Frontier Cleaner-B01 |
| Post CMP Cleaning Solution |
CMP-M02
CMP-M05 series
CMP-M09
CMP-B01
CMP-X01 |
| Post Ashing Residue Remover for Cu/low-k |
DeerClean-LK1
DeerClean-LK2A
DeerClean-LK2v7
DeerClean-LK3 series
DeerClean-LK4 |
| Post Ashing Residue Remover for Al |
For Batch process
DeerClean-NH1 (Al line, Via hole )
DeerClean-NH2 (Al Pad)
SWPR-200 series
SWPR-300 series
SWPR-500 series
For Single wafer process
DeerClean-SA1 (Al line)
DeerClean-SA3 (Al line, Via hole) |
| Etchant for Au |
AURUM-100 series
AURUM-200 series
AURUM-300 series
AURUM-400 series |
