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November, 2009
Exhibition Information
Exhibition for SEMICON JAPAN 2009
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KANTO CHEMICAL will exhibit special functional chemicals for 32 to 45nm generation; New RCA Cleaning Solution at FEOL process. Post Ashing Residue Removers and Post CMP Cleaning Solution for Cu/low-k at BEOL process.
Furthermore, newly developed alkaline Si etching solution for metal contamination control , Gold Plating Solution, Texture Formation Etchant for Solar Cells will also be displayed.
You are always welcome at our booth!
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Exhibit Dates
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Wednesday, December 2– Friday, December 4, 2009 |
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Exhibition Hours
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10:00 – 17:00 |
| Exhibition site |
Makuhari Messe, Chiba, Japan |
| Booth No. |
7B-209 |
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| <Displayed Products> |
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No.
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Application
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Product Name
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1
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New RCA Cleaning Solution |
Frontier Cleaner series |
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2
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Post Ashing Residue Remover for Cu/low-k |
DeerClean-LK series |
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3
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Post Ashing Residue Remover for Al |
DeerClean-SA / NH series |
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4
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Post CMP Cleaning Solution |
CMP-M / B series |
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5
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Alkaline Etchant for Si Wafer |
NaOH-CX |
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6
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Etchant for Au |
AURUM series |
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7
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Au-Ni Alloy Electroplanting Solution |
Aurexel AM |
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8
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Electroless Hard Gold Planting Solution |
Aurexel HG |
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9
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Electroless Gold Planting Solution for
Micro Bump Fabrication |
- Prototype - |
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10
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Texure Formation Etchant for Solar Cells |
- Prototype - |
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11
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Multifunctional Gelators |
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12
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Ionic Liquid |
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13
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Rapidly Switching Photochromic Dye |
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| <Others: introduced with catalogs> |
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1
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Ultrapure Chemicals for Semiconductor Manufacturing Process
- Acids
- Alkalis
- Solvents |
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2
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Potassium Hydroxide aq. Solution
- KOHLM |
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3
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Chemicals for Compound Semiconductor Process
- Citric Acid aq. Solution |
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4
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Ruthenium Remover
- REC series |
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5
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Chemicals for FPD Manufacturing Process
- Etchants
- Cleaning Solutions
- Resist Strippers
- Developers |
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6
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Organic EL Material Cleaning Solution
- OEL Clean series |
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| <Contact> |
Kanto Chemical Co., Inc.
International Business Department
Electronic Materials Division
TEL：+81-3-3667-6993
FAX：+81-3-3667-0440
E-mail： kanto-el61@gms.kanto.co.jp
Attn.: Yabana(Mr.), Goto(Mr.)
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<Exhibit Booth Information> |
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