GHP-3 series
- GHP-3 is a hydrogen peroxide based Cu thin film etchant. (Mild acidic)
- Etching rate depends on temperature, but taper angle and side etching almost doesn’t.
 |
Product Line
| Products | Temperature（℃） | Etching rate （nm/min.） |
Treatment method |
|---|---|---|---|
| GHP-3 | 20～40 | 200 | Dipping and spray |
Etching condition：30℃, stirring 500rpm
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