Frontier Cleaner series
- The cleaning solutions that enable to remove both metallic impurities and particles on wafers simultaneously and cause little reattachment of metallic impurities. Enables to reduce cleaning processes and cost reduction.
Product Line
| Products | Applicable wafer | pH |
|---|---|---|
| Frontier Cleaner-A01 | Si-based wafer | Acidic: Organic acid |
| Frontier Cleaner-A02 | Si-based wafer | Acidic: Inorganic acid |
| Frontier Cleaner-B01 | Si-based wafer | Alkaline |
| Frontier Cleaner-A05 |
SiC, GaN wafer |
Acidic |
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