AURUM series
- AURUM series is an iodine type etchant.
- AURUM-300 series can etch Au selectively with little damage to Ni and Al.
- AURUM-306 can etch Pd selectively.
 |
Product Line
| Products | *Etching rate （nm/min.） |
Fine processing | Features |
|---|---|---|---|
| AURUM-101 |
550(30℃) |
Average |
For general patterning |
| AURUM-302 |
100(30℃) |
Excellent |
For fine patterning |
| AURUM-304 |
300(30℃) |
Excellent |
For fine patterning |
| AURUM-306 |
Pd140/Au80(25℃) |
Excellent |
For Pd selective etching |
| AURUM-401 |
100(30℃) |
Good |
Alkali metal free |
*Etching condition : stirring(weak)
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