AURUM series
- AURUM series is an iodine-based Au etchant.
- AURUM-300 series can be used an Au selective etching solution that hardly dissolves Ni and Al.
- AURUM-304, 305, 306 can also be used as Pd etchant.
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Product Line
| Products | Etching rate （nm/min.） |
Fine processing | Features |
|---|---|---|---|
| AURUM-101 | 550 | ー | For general application, tank cleaning etc. |
| AURUM-201 | 100 | △ | For fine pattern |
| AURUM-302 | 100 | ◎ | For extremely fine pattern, Long bath life |
| AURUM-304 | 300 | ◎ | For extremely fine pattern, Long bath life Capable of using as Pd etching |
| AURUM-306 | 80※ | ◎ | For extremely fine pattern, Long bath life Capable of using as Pd etching |
| AURUM-308 | 650※ | ○ | For extremely fine pattern, Long bath life High etching rate |
| AURUM-314 | 350 | ○ | For extremely fine pattern, Long bath life |
| AURUM-401 | 100 | △ | For general application, Alkali metal free |
Etching condition：stirring (weak), 30℃ ※25℃
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