GHP-3A／BTF-3A
- GHP-3A is a hydrogen peroxide type etchant for Cu selectively.
- BTF-3A is a hydrogen peroxide type etchant for Cu/Ti stacked film.
 |
 |
|
GHP-3A |
BTF-3A |
Product Line
| Products | *Etching rate （nm/min.） |
Features |
|---|---|---|
|
GHP-3A |
130(25℃) |
Little damage to Ni |
|
BTF-3A |
220(25℃) |
Etching Cu/Ti with one step |
*Etching condition : stirring
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