ITO series
- ITO-301 causes less damage to Cu and enables to etch poly-ITO fims selectively.
- ITO-07N, and 101N cause less damage to Al, Cu, Mo, and Ti and enable etching of amorphous ITO films selectively.
 |
Etching rate (Poly-ITO film) (ITO-02) |
Product Line
| Products | エッチング対象 | Etching rate （35℃, No stirring, nm/min） |
防食性 | Treatment method |
|---|---|---|---|---|
| ITO-02 | p-ITO , a-ITO | p-ITO 35 | ー | Dipping and spray |
| ITO-301 | p-ITO 10～20 （30℃, stirring） |
Cu | ||
| ITO-07N | a-ITO , IZO | a-ITO 40 | Al , Cu | |
| ITO-101N | a-ITO 35 |
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