ITO series
- MIXED ACID ITO-02 is for poly ITO.
- ITO-301 can etch poly ITO selectively with little damage to Cu.
- ITO-07N is an acid type etchant for amorphous ITO and IZO.
Product Line
| Products | Etching rate （nm/min） |
Treatment method |
|---|---|---|
| MIXED ACID ITO-02 |
p-ITO 35(35℃) |
For poly ITO, amorphous ITO |
| ITO-301 |
p-ITO 10～20(30℃) |
For poly ITO, amorphous ITO |
| ITO-07N |
a-ITO 40(35℃) |
For amorphous ITO, IZO
Little damage to Al, Cu, Mo, Ti |
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