KNN series
- KNN series is etchant for thin KNN (potassium sodium niobate) film.
- Basic and hydrogen peroxide etchant and capable of extremely fine processing.
- Hard masks such as SiO2, TEOS, SiN are required for patterning.
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Cross-section SEM image after etching with KNN-02 （85℃, no strring, 30min.） |
Product Line
| Products | Temperature（℃） | Etching rate （85℃, No stirring, nm/min.） |
Cross-sectional shape | Etching Method |
|---|---|---|---|---|
| KNN-01 | 80～95 | 50 | Vertical | Dipping |
| KNN-02 | 80～95 | 70 | Vertical | Dipping |
The etching rate and cross-sectional shape vary depending on the KNN film quality.
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