KPZ series
- KPZ series is a PZT (lead zirconate titanate) thin film etchant.
- It is a mixed acid type etchant and can etch PZT at high speed.
- The cross-sectional shape after etching is almost vertical.
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Cross-section SEM image after etching with KPZ-02 （35℃, strong strring, 66sec.） |
Product Line
| Products | Temperature（℃） | Etching rate （35℃, Strong stirring, μm/min.） |
Cross-sectional shape | Etching Method |
|---|---|---|---|---|
| KPZ-02 | 30～40 | 1～3 | Vertical | Spray |
| KPZ-03 | 30～40 | 1～3 | Vertical | Spray |
| KPZ-04 | 20～35 | 10～20（5 ※） | Arout 80° | Dipping and spray |
The etching rate and cross-sectional shape vary depending on the PZT film quality.
※No stirring
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