KPZ series
- KPZ series is an acid type etchant for PZT (lead zirconate titanate) film.
 |
||
Cross-section SEM image after etching with KPZ-02 （35℃, strong strring, 66sec.） |
Product Line
| Products | Temperature（℃） | Etching rate （35℃, Strong stirring, μm/min.） |
Cross-sectional shape | Etching Method |
|---|---|---|---|---|
| KPZ-02 | 30～40 | 1～3 | Vertical | Spray |
| KPZ-04 | 20～35 | 10～20（5 ※） | about 80° | Dipping and spray |
The etching rate and cross-sectional shape vary depending on the PZT film quality.
※No stirring
Contact Us
E-mail Inquiry Form
Telephone