KSMF series
- KSMF series is a mixed acid type etchant (strongly acidic) and can etch Mo/Al or Ti/Al stacked film at once.
- Less side etching and good taper shape.
- KSMF-200 series include fluoride.
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Product Line
| Products | Etching target | Tempereture（℃） | Treatment method |
|---|---|---|---|
| KSMF-100 | Mo/Al stacked film Mo/Al/Mo stacked film |
30～50 | Dipping and spray |
| KSMF-150 | |||
| KSMF-260 | Ti/Al stacked film Ti/Al/Ti stacked film |
Etching condition：stirring (weak), 30℃
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