REC-01

  • REC-01 is an acid type etchant.
  • REC-01 can also etch RuO2.

Product Line

Products *Etching rate
(nm/min.)

Features

REC-01

100(30℃)

For bevel etching
Little damage to AlN, Si, SiN, SiO2

*Etching condition : stirring




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