REC-01
- REC-01 is strongly acidic etchant for Ru thin film.
- Capable of removing ruthenium oxide.
- Heating shortens the liquid life, so it is recommended to use at low temperature as much as possible.
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Product Line
| Products | Temperature（℃） | Etching rate （30℃、nm/min.） |
Treatment Method |
|---|---|---|---|
| REC-01 | 20～40 | 100 | Dipping |
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