TI series
- TI-8A is a hydrogen peroxide type etchant for Ti,TiW and TiN.
- TI-101 is an acid type type etchant for Ti.
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|---|---|---|
Before etching |
After etching |
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TI-101 |
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Product Line
| Products | pH |
*Etching rate |
Features |
|---|---|---|---|
|
TI-8A |
Alkaline |
170(40℃) |
Little damage to Al, Au, Cu, Ni, SiN, SiO2 |
| TI-101 |
Acidic |
210(25℃) |
Little damage to Ag, Au, Cu, Ni, SiN, SiO2 |
*Etching condition : stirring
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