DeerClean-LK series
- The post-etch residue removers that enable to remove residues after dry etching and ashing at low temperature, without causing chemical damages to Cu and a variety of low-k films.
Product Line
| Product name | Removal target |
|---|---|
| DeerClean-LK1 | Cu residue |
| DeerClean-LK3 series | Cu residue, Si residue, Organic residue |
| DeerClean-LK4 | Cu residue, Organic residue |
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