DeerClean-SA series
- The post-etch residue removers that enable removal of the residues after dry etching and ashing at a low temperature in a short time.
 |
Product Line
| Products | pH | Applicable process |
|---|---|---|
| DeerClean-SA1v3 | Acidic | Al line |
| DeerClean-SA3 series | Acidic | Al line and via holes |
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