DeerClean-SA series
- The post-etch residue removers that enable to remove residues after dry etching and ashing at low temperature, without causing chemical damages to Cu and a variety of low-k films.
Product Line
| Products | pH | Applicable process |
|---|---|---|
| DeerClean-SA1v3 | Acidic | Al line |
| DeerClean-SA3 series | Acidic | Al line and via holes |
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