DeerClean-TRP series
- DeerClean-TRP series is a post-etch residue remover that has high selectivity with Co and enables the removal of metal hard masks simultaneously.
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Product line
| Products | Selectivity | TiN etching rate （nm/min.） |
|---|---|---|
| DeerClean-TRP series | Cu、low-k、Co、AlOx | >10 |
Etching rates are measured at 60℃ dipping conditions
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