JELK series
- The resist strippers that do not damage a variety of metallic materials.
- Optimizing the corrosion inhibitor enabled to use this series of products as dry etching post-etch residue removers.
 |
 |
|
|---|---|---|
Before processing |
After processing |
|
Cleaning performance (JELK-101) Substrate structure: TiN/Al-Cu/TiN/TEOS, Temperature: 60℃, Time period: 30 min., Method: Dip (left to stand) |
||
Product Line
| Products | Features |
Materials that can be corrosion-proofed |
Processing time |
Temperature（℃） |
|---|---|---|---|---|
| JELK-001 |
The highest stripping capability among the products of JELK series |
Cu, Ti, TiN, Ni, SiN, Th-Ox, and so on |
1～30 |
25～70 |
| JELK-101 |
Superior metal corrosion protection performance |
Cu, Ti, TiN, Ni, SiN, Th-Ox, Al-Cu, Ag, W, and so on |
||
| JELK-102 |
Superior metal corrosion protection performance and does not fall under the Poisonous and Deleterious Substances Control Law |
|||
| JELK-103 |
Superior balance between stripping performance and corrosion protection performance |
| Products |
Etching rate (nm/min. at 60℃) |
|||
|---|---|---|---|---|
|
Al-Cu |
W |
TEOS | TiN | |
| JELK-001 | 56.9 | 0.3 | <0.1 | <0.1 |
| JELK-101 | 0.1 | 0.1 | <0.1 | <0.1 |
| JELK-102 | 0.1 | 0.1 | <0.1 | <0.1 |
| JELK-103 | 4.7 | 0.3 | <0.1 | <0.1 |
Contact Us
E-mail Inquiry Form
Telephone